Microelectroacoustics: Sensing and Actuation (MEMS Reference Shelf)

MEMS (microelectromechanical systems) products utilize robust processes from the semiconductor industry to make a wide variety of electronic devices smaller, more reliable and cheaper to manufacture. In the field of electro acoustic systems MEMs are now being deployed to develop miniaturized electro acoustic devices. The applications of electro acoustic systems range from miniaturized condenser microphones to speakers, hearing aids, ultrasonic transducers, proximity sensing, and biomedical imaging.