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Scaleable Process for CVD of Large-Area Heteroepitaxial Beta Sic on Tic(x) Using Gases with 1:1 Silicon to Carbon Stoichiometry

Author Richard Koba
Publisher PN
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Book Details
Author(s)Richard Koba
PublisherPN
ISBN / ASINB00DD7BLKA
ISBN-13978B00DD7BLK5
MarketplaceCanada 🇨🇦