Introduction to Semiconductor Manufacturing Technology

For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow.This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail--with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.