The Physics of Submicron Lithography (Microdevices)
Book Details
Author(s)
Kamil A. Valiev
Publisher
Springer
ISBN / ASIN
0306435780
ISBN-13
9780306435782
Availability
Usually ships in 24 hours
Sales Rank
#4,158,581
Marketplace
United States 🇺🇸
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Description
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
