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Dry Etching for VLSI

AuthorA.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
PublisherSpringer
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Book Details

Author(s)A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
PublisherSpringer
ISBN / ASIN0306438356
ISBN-139780306438356
AvailabilityUsually ships in 24 hours
Sales Rank4,184,113
MarketplaceUnited States  🇺🇸

Description

This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing.
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