Noise in Mems Transducers: (Prel 155) (Microsystems)

This book presents the fundamentals of noise and its effect on the minimum detectable signal of mems transducers. The text will bring together the fundamental noise physics, device noise, and circuit noise with applications to MEMS transducers. Cases studies will compare noise floors of mems sensors employing different transduction mechanisms and illustrate design tradeoffs and scaling effects with miniaturization. The goal is to provide the reader with a basic understanding of the effect of device and circuit noise on the performance of mems transducers.