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Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)

AuthorToshiaki Makabe, Zoran Lj. Petrovic
PublisherCRC Press
CategoryScience
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Book Details

Author(s)Toshiaki Makabe, Zoran Lj. Petrovic
PublisherCRC Press
ISBN / ASIN0750309768
ISBN-139780750309769
CategoryScience
MarketplaceUnited States  🇺🇸

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