Electronic Materials Chemistry: An Introduction to Device Processes and Materials Systems

This work examines the fundamental aspects of fabrication technologies that employ highly sophisticated chemical operations of materials. The material chemistry involved in electronic material technologies, especially microelectronic devices, is covered, and a balanced overview of the chemical process technologies associated with electronic materials is given.;College or university bookstores may order five or more copies at a special student price, which is available on request from Marcel Dekker, Inc.