An Introduction to Microelectromechanical Systems Engineering
102.00
USD
Book Details
Author(s)
Nadim Maluf
Publisher
Artech House Print on Demand
ISBN / ASIN
0890065810
ISBN-13
9780890065815
Sales Rank
#1,210,753
Marketplace
United States 🇺🇸
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Description
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
