Microsystems Mechanical Design (CISM International Centre for Mechanical Sciences, 478)

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.