Design and Modeling of Inductors, Capacitors and Coplanar Waveguides at Tens of GHz Frequencies (SpringerBriefs in Electrical and Computer Engineering)

This book describes the basic principles of designing and modelling inductors, MIM capacitors and coplanar waveguides at microwave frequencies. The author explains the design and modelling of key, passive elements, such as capacitors, inductors and transmission lines that enable high frequency MEMS operating at frequencies in the orders of tens of GHz.