MORDA in the Semiconductor Industry: Modeling and Implementation of a System for Multivariate Offline Raw Data Analysis (MORDA) in the Semiconductor Industry

In the course of a feasibility study at the FEOL of the 300 mm semiconductor Fab of Qimonda Dresden, a system for multivariate analysis of time-resolved raw data originating from wafer processing tools was instituted. This system called MORDA (Multivariate Offline Raw Data Analysis) closed the gap between online Fault Detection and Classification basing on statistical key numbers, and offline PCA, PLS and Batch Modelling to diagnose and classify the root causes of Low Yielding Wafers that could not be explained by classical FDC.