Functional doped metal oxide films: Zinc oxide (ZnO): as transparent conducting oxide (TCO)Titanium dioxide (TiO2) as thermographic phosphor and protective coating

This is a dessertation work done in the Universität Duisburg-Essen, Germany under the supervision of Prof. Burak Atakan. The present work deals with two promising metal oxides, namely, zinc oxide and titanium dioxide. Un-doped and Al-doped ZnO films were developed using two reactors: Halogen Lamp Reactor (HLR) (a type of Cold Wall Reactor) and Hot Wall Reactor (HWR), and a comparison was made between them in terms of the film properties and the films were investigated for TCO applications. The second material investigated in this work was un-doped and doped titanium dioxide (TiO2) films developed using sol-gel and cathodic vacuum arc and are investigated as thermographic phosphor (temperature sensor) and as protective coatings.