DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application
Book Details
Author(s)Peter Y. Hsieh
PublisherPN
ISBN / ASINB00J4FP8T0
ISBN-13978B00J4FP8T2
Sales Rank99,999,999
MarketplaceUnited States 🇺🇸
