{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Materials and Processes for Submicron Technologies, Volume 89 (European Materials Research Society Symposia Proceedings)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/008/043/big008043617X.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-008043617X.html\">Materials and Processes for Submicron Technologies, Volume 89 (European Materials Research Society Symposia Proceedings)</a>","width":400,"height":300}