{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"The Deposition of Amorphous Silicon Films by the Technique of Magnetron Sputtering (Energy)","author_name":"H. Arenz","thumbnail_url":"https://www.ebooknetworking.net/books/011/971/big0119719541.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0119719541.html\">The Deposition of Amorphous Silicon Films by the Technique of Magnetron Sputtering (Energy)</a>","width":400,"height":300}