{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Chemical Mechanical Polishing in Silicon Processing: Semiconductors and Semimetals Volume 63","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/012/401/big0124014933.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0124014933.html\">Chemical Mechanical Polishing in Silicon Processing: Semiconductors and Semimetals Volume 63</a>","width":400,"height":300}