{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/012/533/big0125330189.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0125330189.html\">Plasma Sources for Thin Film Deposition and Etching (Physics of Thin Films Volume 18)</a>","width":400,"height":300}