{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Advances in Research and Development, Volume 23: Modeling of Film Deposition for Microelectronic Applications (Thin Films Vol. 23)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/012/533/big0125330235.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0125330235.html\">Advances in Research and Development, Volume 23: Modeling of Film Deposition for Microelectronic Applications (Thin Films Vol. 23)</a>","width":400,"height":300}