{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)","author_name":"Ronald A. Powell, Stephen Rossnagel","thumbnail_url":"https://www.ebooknetworking.net/books/012/533/big012533026X.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-012533026X.html\">PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)</a>","width":400,"height":300}