{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)","author_name":"Wayne M. Moreau","thumbnail_url":"https://www.ebooknetworking.net/books/030/642/big0306421852.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0306421852.html\">Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)</a>","width":400,"height":300}