{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Lecture Notes on Principles of Plasma Processing","author_name":"Francis F. Chen, Jane P. Chang","thumbnail_url":"https://www.ebooknetworking.net/books/030/647/big0306474972.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0306474972.html\">Lecture Notes on Principles of Plasma Processing</a>","width":400,"height":300}