{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Introductory MEMS: Fabrication and Applications","author_name":"Thomas M. Adams, Richard A. Layton","thumbnail_url":"https://www.ebooknetworking.net/books/038/709/big0387095101.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0387095101.html\">Introductory MEMS: Fabrication and Applications</a>","width":400,"height":300}