{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration","author_name":"Jean Laconte, Denis Flandre, Jean-Pierre Raskin","thumbnail_url":"https://www.ebooknetworking.net/books/038/728/big0387288422.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0387288422.html\">Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration</a>","width":400,"height":300}