{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Microelectroacoustics:  Sensing and Actuation (MEMS Reference Shelf)","author_name":"Mark Sheplak, Peter V. Loeppert","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0387324712.html\">Microelectroacoustics:  Sensing and Actuation (MEMS Reference Shelf)</a>","width":400,"height":300}