{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Rapid Thermal Processing for Future Semiconductor Devices","author_name":"H. Fukuda","thumbnail_url":"https://www.ebooknetworking.net/books/044/451/big0444513396.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0444513396.html\">Rapid Thermal Processing for Future Semiconductor Devices</a>","width":400,"height":300}