{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering","author_name":"Tai-Ran Hsu","thumbnail_url":"https://www.ebooknetworking.net/books/047/008/big0470083018.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0470083018.html\">MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering</a>","width":400,"height":300}