{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Glow Discharge Processes: Sputtering and Plasma Etching","author_name":"Brian Chapman","thumbnail_url":"https://www.ebooknetworking.net/books/047/107/big047107828X.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-047107828X.html\">Glow Discharge Processes: Sputtering and Plasma Etching</a>","width":400,"height":300}