{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Chemical Mechanical Planarization of Microelectronic Materials","author_name":"Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann","thumbnail_url":"https://www.ebooknetworking.net/books/047/113/big0471138274.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0471138274.html\">Chemical Mechanical Planarization of Microelectronic Materials</a>","width":400,"height":300}