{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Microelectronic Applications of Chemical Mechanical Planarization","author_name":"Wiley","thumbnail_url":"https://www.ebooknetworking.net/books/047/171/big0471719196.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0471719196.html\">Microelectronic Applications of Chemical Mechanical Planarization</a>","width":400,"height":300}