{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Fundamentals of Semiconductor Manufacturing and Process Control","author_name":"Gary S. May, Costas J. Spanos","thumbnail_url":"https://www.ebooknetworking.net/books/047/178/big0471784060.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0471784060.html\">Fundamentals of Semiconductor Manufacturing and Process Control</a>","width":400,"height":300}