{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics & Microelectronic Engineering)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0521570808.html\">Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics &amp; Microelectronic Engineering)</a>","width":400,"height":300}