{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Radio Frequency Power Plasmas: 16th Topical Conference on Radio Frequency Power in Plasmas (AIP Conference Proceedings / Plasma Physics)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/073/540/big0735402760.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0735402760.html\">Radio Frequency Power Plasmas: 16th Topical Conference on Radio Frequency Power in Plasmas (AIP Conference Proceedings / Plasma Physics)</a>","width":400,"height":300}