{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)","author_name":"Toshiaki Makabe, Zoran Lj. Petrovic","thumbnail_url":"https://www.ebooknetworking.net/books/075/030/big0750309768.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0750309768.html\">Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)</a>","width":400,"height":300}