{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"2000 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Asmc 2000 Proceedings","author_name":"IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop","thumbnail_url":"https://www.ebooknetworking.net/books/078/035/big0780359216.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0780359216.html\">2000 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Asmc 2000 Proceedings</a>","width":400,"height":300}