{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Boston, Massachusetts, Usa, April 30-May 2, 2002","author_name":"IEEE","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0780371585.html\">2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Boston, Massachusetts, Usa, April 30-May 2, 2002</a>","width":400,"height":300}