{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"15th IEEE International Conference on Micro Electro Mechanical Systems: Las Vegas, Nevada, Usa, January 20-24, 2002","author_name":"IEEE","thumbnail_url":"https://www.ebooknetworking.net/books/078/037/big0780371852.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0780371852.html\">15th IEEE International Conference on Micro Electro Mechanical Systems: Las Vegas, Nevada, Usa, January 20-24, 2002</a>","width":400,"height":300}