{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)","author_name":"Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo","thumbnail_url":"https://www.ebooknetworking.net/books/081/551/big0815512201.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0815512201.html\">Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)</a>","width":400,"height":300}