{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)","author_name":"Kiyotaka Wasa, Shigeru Hayakawa","thumbnail_url":"https://www.ebooknetworking.net/books/081/551/big0815512805.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0815512805.html\">Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)</a>","width":400,"height":300}