{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"High Density Plasma Sources: Design, Physics and Performance (Materials Science and Process Technology)","author_name":"Oleg A. Popov","thumbnail_url":"https://www.ebooknetworking.net/books/081/551/big0815513771.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0815513771.html\">High Density Plasma Sources: Design, Physics and Performance (Materials Science and Process Technology)</a>","width":400,"height":300}