{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Thin Film Materials Technology: Sputtering of Compound Materials","author_name":"Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi","thumbnail_url":"https://www.ebooknetworking.net/books/081/551/big0815514832.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0815514832.html\">Thin Film Materials Technology: Sputtering of Compound Materials</a>","width":400,"height":300}