{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Selected Papers on Optical Microlithography (S.P.I.E. Milestone Series)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/noimage.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819409863.html\">Selected Papers on Optical Microlithography (S.P.I.E. Milestone Series)</a>","width":400,"height":300}