{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California (Critical Reviews of Optical Science & Technology)","author_name":"Society of Photo-Optical Instrumentation Engineers","thumbnail_url":"https://www.ebooknetworking.net/books/081/941/big0819413631.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819413631.html\">Handbook of Critical Dimension Metrology and Process Control: Proceedings of a Conference Held 28-29 September 1993 Monterey, California (Critical Reviews of Optical Science &amp; Technology)</a>","width":400,"height":300}