{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Photomask And X-ray Mask Technology (Proceedings / SPIE--the International Society for Optical Engineering)","author_name":"Hideo Yoshihara","thumbnail_url":"https://www.ebooknetworking.net/books/081/941/big0819415634.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819415634.html\">Photomask And X-ray Mask Technology (Proceedings / SPIE--the International Society for Optical Engineering)</a>","width":400,"height":300}