{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Integrated Circuit Metrology, Inspection and Process Control IX: 20-22 February 1995, Santa Clara, California (Proceedings / SPIE--the International Society for Optical Engineering)","author_name":"","thumbnail_url":"https://www.ebooknetworking.net/books/081/941/big0819417874.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819417874.html\">Integrated Circuit Metrology, Inspection and Process Control IX: 20-22 February 1995, Santa Clara, California (Proceedings / SPIE--the International Society for Optical Engineering)</a>","width":400,"height":300}