{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Process, Equipment, And Materials Control in Integrated Circuit Manufacturing (Proceedings / SPIE--the International Society for Optical Engineering)","author_name":"Raaijmakers Sabnis","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819420034.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819420034.html\">Process, Equipment, And Materials Control in Integrated Circuit Manufacturing (Proceedings / SPIE--the International Society for Optical Engineering)</a>","width":400,"height":300}