{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society of Optical Engineering, V. 2639.)","author_name":"Karen W. Markus","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819420050.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819420050.html\">Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society of Optical Engineering, V. 2639.)</a>","width":400,"height":300}