{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Microelectronic Structures and Microelectromechanical Devices: 24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2641.)","author_name":"Wayne E. Bailey","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819420077.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819420077.html\">Microelectronic Structures and Microelectromechanical Devices: 24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2641.)</a>","width":400,"height":300}