{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2642.)","author_name":"National Institute of Standards and Technology (U. S.)","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819420085.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819420085.html\">Micromachined Devices and Components 23 24 October 1995: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--the International Society for Optical Engineering, V. 2642.)</a>","width":400,"height":300}