{"version":"1.0","type":"rich","provider_name":"EbookNetworking","provider_url":"https://www.ebooknetworking.net","title":"Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)","author_name":"Harry J. Levinson, Mark A. McCord, Franco Cerrina, Robert D. Allen, John G. Skinner, Andrew R. Neureuther, Martin C. Peckerar, F. Keith Perkins, Michael J. Rooks","thumbnail_url":"https://www.ebooknetworking.net/books/081/942/big0819423785.jpg","thumbnail_width":330,"thumbnail_height":500,"html":"<a href=\"https://www.ebooknetworking.net/books_detail-0819423785.html\">Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)</a>","width":400,"height":300}